차세대반도체소자연구실(ASDL) > 개별연구실

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개별연구실

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차세대반도체소자연구실(ASDL)

Advanced Semiconductor Device Laboratory

교수명

  • 안종태 교수

보유 장비

장비 이미지
No. 1
Optical microscope

설치위치
  • Room 104, Building 98 (Global Lifelong Learning Center)
장비스펙
  • Magnification range: 100× to 1000×, bright field/dark field.
장비소개
  • A microscope that visually magnifies micro-sized objects.
활용분야
  • Optical imaging of 2D semiconductor electrons and semiconductor devices, etc.
장비 이미지
No. 2
Parameter analyzer

설치위치
  • Room 104, Building 98 (Global Lifelong Learning Center)
장비스펙
  • 10aA – 1A, 0.2µV – 210V, ±40V(80V p-p), ±800mA 200MSa/sec, 5ns 샘플링 레이트
장비소개
  • Equipment for analyzing the electrical properties of semiconductor devices.
활용분야
  • Measurement of I-V and C-V characteristics of semiconductor devices.
  • Photocurrent measurement of optoelectronic devices.
장비 이미지
No. 3
MST5500B

설치위치
  • Room 104, Building 98 (Global Lifelong Learning Center)
장비스펙
  • 4 Micro positioner, dark shield box
장비소개
  • Physical contact is established to measure the electrical properties of semiconductor devices.
활용분야
  • Measurement of I-V and C-V characteristics of semiconductor devices.
  • Photocurrent measurement of optoelectronic devices.
장비 이미지
No. 4
Mask Aligner

설치위치
  • Room 104, Building 98 (Global Lifelong Learning Center)
장비스펙
  • ~5 µm resolution.
장비소개
  • A mask alignment system for photolithography exposure.
활용분야
  • photolithography

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